| 1 | Class1 and Class1000(0.1μm)Clean Room <3.8 × 3 .6× 2.9m3，Humidity ± 0.1 ℃，RH± 1%〉 |  |
| 2 | A Class0.1 Mini-Environment |  |
| 3 | Ultrasonic Anemometer 2 |  |
| 4 | CNC particle counter 1台 |  |
| 5 | Laser particle counter〈0.1μm~1.0μm〉2台 |  |
| 6 | Ultrasonic flowmeter | |
| 7 | TESTO three hygrometer |  |
| 8 | HOTWIRE hot wire anemometer |  |
| 9 | Micro-differential pressure gauge <resolution ± 0.1Pa> |  |
| 10 | Engineering Analysis Software，include：Fluent, Start-CD, Phoenics, CFX, ANSIS, TASTE |  |
| 11 | Gas Detector〈for NH3,HF...etc〉 | |
| 12 | Power Meter | |
| 13 | RTD Thermal Meter | |
| 14 | Temperature and humidity corrector | |
| 15 | 6Stage 1 stage Anderson sampler |  |
| 17 | Green Laser Module |  |