Heben laboratory
Lai Weihao Master Thesis：
Research on improving liquid film uniformity of semiconductor etching equipment by applying flow field visualization and computational fluid dynamics (published in
IEEE Transactions on Semiconductor Manufacturing 題目： Improving Liquid Film Thickness Uniformity of Semiconductor Etching Equipment Using Flow Field Visualization and CFD Simulation）
Won the [Taiwan Refrigeration and Air Conditioning Society]–2021Annual Engineering Paper Award Winner。