Dr. Shih-Cheng Hu.

Heben laboratory

Lai Weihao Master Thesis：

Research on improving liquid film uniformity of semiconductor etching equipment by applying flow field visualization and computational fluid dynamics (published in
IEEE Transactions on Semiconductor Manufacturing 題目： Improving Liquid Film Thickness Uniformity of Semiconductor Etching Equipment Using Flow Field Visualization and CFD Simulation）

Won the [Taiwan Refrigeration and Air Conditioning Society]–2021Annual Engineering Paper Award Winner。

Faced with an increasingly competitive industry environment，only when we continue to strengthen our own knowledge and skills can we become invincible。Clean Technology Center, Taipei University of Technology , takes serving society and improving clean technologies as a purpose，keeping introducing new knowledge ,and provides opportunities for short-term study of the industry。This course mainly provides appropriate and immediate training courses for factory system management and industrial clean room。

Course content covers owners(Party A) ，contractors(Party B)，, operators ,designers ，the theoretical and knowledge to practice。The lecturers of Course come from industry and academic institutions，and all of them expert in various fields 。We are looking forward to contributing our part to the fundamental technology industry in Taiwan。

♦ Date：
Facility Management System :2022/08/09(Tuesday) 9:00-17:30
Industrial clean room :2022/08/10(Wednesday) 9:00-17:30

♦ costs：
Daily whole curriculum NT $ 3,000。
Members of Industry-Academia Union and the Association of clean preferential will enjoy a 20% OFF discount for each purchase(Corporate members will have four quotas for the discount，Started from the fifth person, the price will restore to its original price)。
If you receive a payment notice，and you find the amount wrong, please call us。

***If the number of applicants is less than 20，Classes will be postponed!!!***

♦ payment method：
After the registration is completed，the payment bill will be sent to your e-mail，
Please bring the payment bill to a convenience store、BankTaiwan branch or ATM payment and so on。
※ The write-off payments of post office counter and、convenience stores are slower，it will take 7-10 working days to be recorded。If you need the receipt urgently, please pay earlier or use transfer mode!

♦ Speaker：
Dr. Shih-Cheng Hu (Taipei University of Technology)
Lu Qinghui (Green Energy Institute of Industrial Technology Research Institute)
Liu Yaoyu (Lianzhou Technology)
Longbin Zhou (Taiwan Heat Flow Technology)
Jianlin Li (Hanke System Technology)
Dongxin Wang (The world's advanced)
Zhang Zhenguang (Yisheng System Engineering)
Dr. Lin (Taipei University of Technology)
Yu Hao Kang (Industrial Technology Research Institute)

♦ Venue：
National Taipei University of Technology (location to be determined) (No. 1, Section 3, Zhongxiao East Road, Daan District, Taipei City)

※ transportation route description

[Driving]
Zhongshan Expressway(National Highway 1)Section 3, Jianguo North Road, north to Taipei：From Yuanshan Interchange/Jianguo Elevated Road Exit, get off the interchange and head to Minquan East Road → take Jianguo North Road Section 2 and Jianguo North Road Section 1 to Jianguo South Road Section 1 → toll parking lot under Jianguo Viaduct。

【High Speed ​​Rail】Taipei Station
Transfer to MRT Bannan Line(blue line)Zhongxiao Xinsheng Station fourth exit。

【Taiwan Railway】
Take the bus to Taipei Main Station and transfer to the MRT Bannan Line(blue line)Zhongxiao Xinsheng Station fourth exit。

• 

♦ Organizer ：
National Taipei University of Technology of clean technology R & D center
National Taipei University of Technology Semiconductor Manufacturing and Process Equipment Center

♦ Co-organizer：
China Association of clean technologies、Department of Civil Engineering Buildings and facilities of high-tech research center Taiwan University、 SEMI High-Tech Plant Facilities Committee、National Taiwan University Climate、weather、Disaster Research Center-Sustainable Development and Industrial Technology Group、National Taipei University of Technology Industry-Academic Office

♦ syllabus

	8"Factory System Management" on 9th	
time	Course Title	Teacher
09:00-09:30	Introduction to System Management Facility	Dr. Shih-Cheng Hu
09:30-10:30	Challenges and paths of net-zero greenhouse gas emissions in the electronics industry	Lu Qinghui
10:30~12:00	Factory AMC measuring instrument and system construction	Liu Yaoyu
12:00-13:00	lunch	
13:00-14:00	PCW system management and design	Longbin Zhou
14:00 -15:00	Management and Design of Local Waste Treatment System	Jianlin Li
15:00 -15:30	Afternoon tea	
15:30-16:30	Factory workers safety system design and management	Dongxin Wang
16:30-17:30	Water system management and design	Dongxin Wang

	8"Industrial Cleanroom" on 10th	
time	Course Title	Teacher
09:00-10:00	The concept of clean room、Its standard design program	Dr. Shih-Cheng Hu
10:00-11:00	Clean room air conditioning system design	Zhang Zhenguang
11:00-12:00	Clean room construction planning	Zhang Zhenguang
12:00-13:00	lunch	
13:00-15:00	Cycle air-conditioning system	Dr. Lin
15:00-15:30	Afternoon tea	
15:30-17:30	Control design gaseous chemical contaminants clean room	Yu Hao Kang

♦ Online registration is available：

https://forms.gle/xWyv3x6et7ihe3Zj9

Registration deadline：08/05(Fives)12 noon:00
Please pay attention to the deadline for registration!

♦ Contact Information：

https://lin.ee/9iEgdo1

*Join the official Line account to receive relevant information instantly

TEL：
(02) 2771-2171 #3588 Miss Shi 、 Miss Liu

Professor Hu Danzheng

Professor Hu Danzheng，Teaching in the Department of Energy and Refrigeration and Air Conditioning Engineering as one of the most senior seniors。Over 15 years of industry-university cooperation in the field of cleanliness，Currently Distinguished Professor at National Taipei University of Technology，Graduated from Auburn University with a master's degree in mechanical engineering、PhD in Construction Equipment Engineering, University of Liverpool, UK，Served as the fifth chairman of TCTA China Clean Technology Association。The commissioner of the Cleansing Association went to Beijing University of Science and Technology to have a dialogue with experts，Presented in a question-and-answer format，Let the readers experience the interview together。 

– How to use the mode of industry-university cooperation to enhance industrial competitiveness?

Professor Hu shared，The research and development technology of the clean center of National Taipei University of Technology (hereinafter referred to as BIT) is market-oriented。In the past ten years, nearly 30 domestic and foreign invention patents have been applied for，More than half of them have successfully transferred technology to industry。Most manufacturers do not prefer to invest in R&D costs by themselves，Therefore, the school continues to improve and innovate through industry-university cooperation，Therefore, the cooperation between schools and enterprises is mainly divided into two ways："Provide services" and "Provide patents" respectively。in service，Ask a question from the manufacturer，Technical support from Beijing University of Science and Technology，provide the solution。on the patent，According to manufacturer's needs，Understand the need for a patent or related product，Beijing University of Science and Technology provides the most suitable solution to choose。 

– What are the successful cases of industry-university cooperation? 

The most recent successful case is the cooperation with TSMC，Professor Hu speaks humbly。Beijing University of Science and Technology uses a 12-inch wafer cassette unloading device for the overall solution of pollution control，TSMC has certified，Product yield increased from 1.8% to 2%，Nearly 2,000 sets have been sold，Create an output value of nearly 200 million Taiwan dollars。It is a very successful business model and technology transfer model in industry-university cooperation。Other success stories，Research equipment that contaminates wafers，The industry that is promoted to the clean field is like AUO、Innolux、Xinxing Electronics, etc.，and apply the knowledge of fluid mechanics to the limit in the operating room and hospital field, etc.，As long as a clean environment is required，can be applied to the technology of Taiwan University of Science and Technology。 

– What is the secret of Taiwan University of Science and Technology's solid R&D technology?

Taiwan University of Science and Technology has cooperated with TSMC for more than ten years，found many needs。Especially in the field of high-end processes，More than 90% of the equipment of large factories depends on foreign imports，But foundry accounts for more than 60% of Taiwan's overall economy，Equipment imported from abroad is not perfect，There are still neglected functions required in the actual process。Therefore, Taiwan University of Science and Technology Liji in "foreign equipment manufacturers have not done，we do。"Such as a solution for micro-contamination of wafers， Innovation in small areas，Technology is unique in the world。 

– Look at the international market，Promotion and prospect of clean technology in Taiwan?

"Taiwan should promote clean technology as a brand product into the international market"，Professor Hu's sincere expression。Taiwan has a unique design concept in process equipment，different from traditional Japanese、U.S.、German clean technology，Taiwan can use the method of cost reduction and product optimization to construct，through

Years of practical experience in wafer industry and clean room，and apply strict environmental protection standards。Strong strength and high competitiveness are not a problem。But such a large group battle，At present, in addition to TSMC and Hantang，No other company in Taiwan can do comprehensive contract engineering and resource integration。In addition to the lack of multinational talents，Companies with multinational resources are also insufficient。At this stage, many are basic and intermediate technical needs，Markets such as Southeast Asia。For the Mainland China market，Professor Hu has reservations。However，Electronics industry needs unknown to manufacturers in many other countries，It is a strong foundation for the Taiwan team to advance in the international market。 

Intertwined between a sense of achievement and a sense of crisis，Professor Hu Shizheng has more than 20 years of teaching and industry-academia experience，Almost watching the pain of Taiwan's semiconductor industry、grow and flourish。I believe in this short interview，It's just the tip of the iceberg in Professor Hu's learning.。Even with decades of experience，remain humble and cautious，Silently promote the new generation of talents，Research and development in the clean field。 

Professor Shi Yangzheng 

Professor Shi Yangzheng，Currently teaching in the Department of Energy and Refrigeration and Air Conditioning Engineering and one of the most senior seniors，Served at National Taipei University of Technology for more than 20 years。Graduated from National Taiwan University with a master's degree in Mechanical Engineering、Ph.D., Mechanical Engineering, Penn State University，Served as ASHRAE American Society of Refrigeration and Air Conditioning Engineers Taiwan Branch District President。Specializing in domestic and foreign industry-university research and development in energy and refrigeration and air-conditioning engineering。Interview with Professor Shi，will also be presented in an interactive，Provide readers with a contextual perspective。 

– What are the recent successful cases of industry-university cooperation at home and abroad?

Foreign industry-university cooperation is like Denmark's wind power generation in the Zhangbin Industrial Zone，Commissioned Taiwan to simulate how to design tunnels to provide efficient power transmission。 Professor Shi shared，Because the weather in Taiwan is different from Northern Europe，dry compared to northern Europe，Taiwan is hot and humid all year round，More efficient heat dissipation is required。 when the temperature is too high，reduces cable efficiency。Therefore, Beijing University of Science and Technology made a comparison between last year and the year before.，Commissioned by Denmark to cooperate to research this block， Provide situational simulation and design。Domestic Industry-University Cooperation Project，larger，Such as Taoyuan MRT，must be tested to see if the platform doors can withstand the stress the trains are subjected to in operation.，Simulation on the computer with fluid mechanics, etc.。 

– Share the founding concept and value of the "International Industry-University Alliance IAIA" of Beijing University of Science and Technology?

This is an alliance dominated by Beijing University of Science and Technology，At present, 10% of the listed cabinets are Beijing University of Science and Technology alumni，Therefore, I hope to play a bridge role through this platform center，Strengthen and complement resources between industry and academia。The industry-academia alliance is deeply cultivated in the five major blocks，industry-academia promotion group、Patent Technology Transfer Group、Innovation breeding group、Germination Center and Price Creation Project。In the industry-academic award last year，Professor Hu's team won the championship in the professional technology transfer group，Professor Shi's team won the championship in the industry-academia promotion group，The combination of the double crown，very good performance。 

– Will the cooperation model between Beijing University of Science and Technology and the industry be promoted to the international industry in the future?

Teacher Shi said，Promote the model of industry-university cooperation to the international industry，Currently want to develop with high efficiency，It is in line with the government's southward policy, and it is easier to develop in neighboring countries first.。Taiwan belongs to ASHRAE(American Society of Heating and Air-Conditioning Engineers)One of the thirteenth district members of the American Society of Refrigeration and Air Conditioning Engineers，Southeast Asian countries in the same region account for eight、Northeast Asian countries include Japan and South Korea。Advantages through policy and international societies，It is highly feasible to prioritize the development of neighboring countries。 

Industry-academia cooperation for current energy conservation and carbon reduction，Professor Shi admitted that green energy is indeed a challenging topic，Semiconductor itself is a power-hungry process。But this field is researched by Professor Hu，Recently, a unit specializing in environmental protection and green energy has been established near Beijing University of Science and Technology.，Provide an assistance center for semiconductor-related manufacturers。In undertaking several industry-academic cases，Most require extensive research data and computer simulation solutions，Therefore, in each patented R&D process，Compared with the physical strength consumed by the on-site process，Beijing University of Science and Technology invests in the team's unremitting efforts、Continuous innovation brain power and experimental spirit。

"Clean Technology and Industry-University Link"- Interview with Taipei University of Technology

Vibrant young students shuttle across the school gates，There was laughter and laughter and discussions。The clean commissioner visited the talent center and R&D center of Crouching Tiger, Hidden Dragon in Taiwan.，Taipei University of Technology。We are honored to experience a miniature clean room、Visit the Computer Simulation Experiment Field Research Laboratory，And an exclusive interview with two senior professors in the field of clean technology，A look at the achievements of BIT's industry-university cooperation in recent decades。 

The first station：Simulate a clean room 

First, go to the miniature version of the simulated clean room of Beijing University of Science and Technology，Detailed explanation by three graduate students in the department，from after passing through the air bath，Signs and reasons for positive and negative pressure on the wall、Uses of the microenvironment、Wafer unloading unit and cleaning area, etc.，Precise processes carry wafers worth hundreds of billions of dollars，Don't be sloppy。 

The second stop：Computer Simulation Experiment Field Research Laboratory

Led by Huang Jiasong, the current chairman of China Clean Technology Association，Come to Beijing University of Science and Technology's exclusive computer simulation experiment field research laboratory。Enter the door and face a large special machine，It turns out that this is a "large-area flow field simulation device" developed by Beijing University of Science and Technology.，The graduate student who led the narration happily explained，Advanced breakthrough design through four major equipment，Can produce large-area flow field experimental results that can be visualized，How it differentiates itself from similar devices on the market，respectively：Laser light source、tracer gas、High-sensitivity camera and PIV analysis software。 

Experimental results can be produced through a large-area flow field simulation device，For example, the intrusion of contaminants on the vertical surface when the wafer cassette is forced to be cleaned, its humidity and PIV analysis、Simulation of human use of high-flow respirator and its PIV analysis、Visually observe high-resolution and high-wide-angle indoor airflow and flow fields, etc.。After understanding the function of the analog device，Graduate students and Chairman Huang use previous cooperation projects，Describe the development process and method of the experiment，as from basic modeling、Field location、Factory test、Airflow Simulation、Data entry source, etc.。According to the needs of different manufacturers，Consideration from all aspects，It can be said to be a superb example of industry-university cooperation.。 

The third station：Professor Interview – Hu Shizheng and Shi Yangzheng

Interview with two veterans of the golden brain who have experienced many battles，respectively：Professor Hu Danzheng，Specializing in the research and development and industry-academia of clean technology。Professor Shi Yangzheng，Industry-academia specializing in energy and mechanical engineering。The two add up more than half a century of investment between education and industry，Various achievements have been recognized by the industry，also worried about the future。Beijing University of Science and Technology has been through industry-university cooperation for several years，Patent technology protection and successful technology transfer

Commodity cases abound，Understand the tendencies of many manufacturers in Taiwan and the way the academic research community conducts industry-academia R&D，Develop new technologies or solutions to needs。Right now，Has assisted countless practitioners in the field of cleaning，Improve yield and market competitiveness。Teachers and students involved in R&D can also apply what they have learned，Practical drills before entering the workplace，Better understanding of industry needs。 

Summarize

Taiwan's deep technical background，Experienced in the market，But the one that can really occupy a place in the international market，In addition to a few well-known large factories，Other small and medium-sized enterprises are almost innumerable。Professor Hu Shizheng mentioned in an exclusive interview that "Taiwan should promote clean technology as a brand product into the international market"，Relying on Taiwan's good at using construction methods to reduce costs and optimize products，Combining years of practical experience in wafer industry and clean room，Apply strict environmental protection standards，Then create a highly competitive clean process contracting project。The biggest challenge now is，Insufficient resources of multinational talents and multinational companies。 

crisis for the future，It's the hope of a turnaround。Share the research and development process of the visiting project from a pair of luminous and confident eyes，I believe that the new generation in Taiwan will be guided by the heart of the predecessors，will excel，Create a name in the future international market。well-known proverbs："One runs fast，A group of people go far。As Lu Xingzhi, a senior semiconductor industry critic, said, "Taiwan must learn to fight in groups.，Only in order to establish a platform to go international，No longer just talk on paper。」